Slide part and surface processing method of the same

ABSTRACT

A slide part has a surface structure in which there are at least two periodic structures among a first periodic structure with a period of 10 nm to 100 nm inclusive and a depth of 5 nm to 50 nm inclusive, a second periodic structure with a period of 100 nm to 1000 nm inclusive and a depth of 20 nm to 500 nm inclusive, and a third periodic structure with a period of 1000 nm to 10000 nm inclusive and a depth of 100 nm to 3000 nm inclusive, in which one of the at least two periodic structures is formed on the other periodic structure.

The present application is a divisional application of co-pending U.S.application Ser. No. 13/008,639, filed Jan. 18, 2011, the contents ofwhich are expressly incorporated by reference herein in their entirety.

TECHNICAL FIELD

The present invention relates to a slide part such as a mold forprecisely forming fine connectors or other electronic devices 5 and amethod of processing the surface of the slide part.

BACKGROUND ART

Many slide parts such as drills or other tools, molds, and engine partsare industrially used. For example, in press mold working, thelubrication mechanism on the friction interface during processinggreatly affects the quality characteristics such as reduction of burrsof a press molded product and the durability of the mold of a punch ordie. This lubrication mechanism includes an injection mechanism, whichinjects a lubricant into the friction interface, and a frictionreduction mechanism, which uses a lubricant to reduce friction on thefriction interface.

One injection mechanism uses projections and depressions on the materialsurface to inject the lubricant. There are various sizes of projectionsand depressions (surface roughness) on the surface of a workpiece ormold. The lubricant applied to the workpiece or mold before processingis stored in the depressions on the surface (storage effect). If thereis no space to which the lubricant escapes when the mold and theworkpiece make contact each other, the lubricant is encapsulated in thedepressions and the lubricant is supplied to the friction interface withthis state maintained. The depressions containing the lubricant arereferred to as micro pools or lubricant pools in plastic working. Thistype of injection mechanism is expected in all types of plastic working.

When the surface roughness of the workpiece or mold is increased inadvance by acid corrosion, shot peening, or sand blast in order to takeadvantage of this storage effect, the lubricant is easily injected,friction is reduced by the friction reduction mechanism, and galling orwelding can be prevented. With the progress of pressure working, a highhydrostatic fluid pressure applies to the lubricant in micro pools andsupports part of the pressure of the processed surface. In this state,the contact ratio between the workpiece and the mold is prevented fromincreasing (friction reduction mechanism). The technical informationrelated to this is described in non-patent literature 1 (“Tribology ofPress Working”, edited by Japan Metal Stamping Association, written bySeiji Kataoka, issued by the Nikkan Kogyo Shinbun, Ltd.).

The prior art for forming micro pools on the surface of a metal memberis disclosed by, for example, patent literature 1 (Japanese PatentApplication Laid-Open No. 2005-144528), patent literature 2 (JapanesePatent Application Laid-Open No. 7-18403), and patent literature 3(Japanese Patent Application Laid-Open No. 2001-247948).

Patent literature 1 discloses a mold for which lubricant pools with asize of approximately 3 μm×3 μm×1.5 μm are formed on a molding diesurface of the mold surface that makes contact with the workpiece. Whenforming work is performed with a lubricant present between the mold andthe workpiece, the lubricant is stored in the lubricant pools.Accordingly, the workpiece is formed with high lubricity kept betweenthe mold die surface of the mold and the surface of the workpiece.

Patent literature 2 discloses a metal member in which micro pools with adepth of 2 μm or more, a density of 200 units/mm² to 8200 units/mm², andan area ratio of 10% to 70% are formed by heat treatment of alloymaterial.

Patent literature 3 discloses a metal member having grooves with a depthof 0.1 μm to 5.0 μm inclusive at an area ratio of 0.1% to 30.0%inclusive on the surface and particle projections with a diameter of 5nm to 500 nm inclusive, viewed from the surface, a height of 5 nm to 500nm inclusive at an area ratio of 30% or more (including 100%) in thesurface other than the above.

The prior arts improve the holding characteristics of a lubricant byforming micro pools on the surface of the metal member. If this metalmember is used repeatedly for processing, however, adhesion of theworkpiece to the surface of the metal member occurs, thereby causingwear of the metal member and dimensional error of a molded product.

SUMMARY OF THE INVENTION

The present invention addresses these problems with the object ofproviding a slide part and a method of processing the surface of theslide part that make adhesion of the workpiece to the surface of theslide part difficult.

A first aspect of the present invention is a slide part that has asurface structure in which there are at least two periodic structuresamong a first periodic structure with a period of 10 nm to 100 nminclusive and a depth of 5 nm to 50 nm inclusive, a second periodicstructure with a period of 100 nm to 1000 nm inclusive and a depth of 20nm to 500 nm inclusive, and a third periodic structure with a period of1000 nm to 10000 nm inclusive and a depth of 100 nm to 3000 nminclusive, in which one of the at least two periodic structures isformed on the other periodic structure.

A second aspect of the present invention is the slide part according tothe first aspect, in which at least one of the second periodic structureand the third periodic structure is a ripple structure.

A third aspect of the present invention is the slide part according tothe second aspect, in which the ripple structure of the at least one ofthe second periodic structure and the third periodic structure is formedin a direction orthogonal to a slide direction of the slide part.

A fourth aspect of the present invention is the slide part according toany one of the first to third aspects, in which the surface structure isformed at least on an edge of the slide part.

A fifth aspect of the present invention is a method of processing asurface of a slide part using a gas cluster ion beam, in which themethod has a step of radiating the gas cluster ion beam from a directionparallel to a slide direction of the slide part.

A sixth aspect of the present invention is the method of processing thesurface of the slide part according to the fifth aspect, in which anangle formed by the gas cluster ion beam to be radiated and a linenormal to the surface of the slide part ranges from 30 degrees to 75degrees inclusive.

Effects of the Invention

According to the present invention, the slide part has the surfacestructure including at least two periodic structures among the secondperiodic structure with a size similar to that of adhesion, the thirdperiodic structure with a size larger than that of adhesion, and thefirst periodic structure with a size smaller than that of adhesion, inwhich one of the at least two periodic structures is formed on the otherstructure, so adhesion to the slide part is unlikely to occur. Inaddition, the life and maintenance period of the slide part itself canbe extended.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 schematically shows the occurrence of adhesion in press working(the prior art) even using a mold having a very flat surface,specifically, an illustration (a) in FIG. 1 shows the state before thepress working and an illustration (b) in FIG. 1 shows the state afterthe press working;

FIG. 2 shows transfer particles observed by a scanning electronmicroscope;

FIG. 3 schematically shows the occurrence of adhesion in press working(the prior art) using a mold with periodic projections and depressionson its surface, specifically, an illustration (a) in FIG. 3 shows thestate before the press working and an illustration (b) in FIG. 3 showsthe state after the press working;

FIG. 4 schematically shows the occurrence of adhesion in press working(the prior art) using a mold with irregular projections and depressionson its surface, specifically, an illustration (a) in FIG. 4 shows thestate before the press working and an illustration (b) in FIG. 4 showsthe state after the press working;

FIG. 5 shows that no adhesion occurs in press working using the slidepart (mold) according to the present invention, specifically, anillustration (a) in FIG. 5 shows the state before the press working andan illustration (b) in FIG. 5 shows the state after the press working;

FIG. 6 shows a set of the images observed by an atomic force microscopeand a schematic view, specifically, an image (a) in FIG. 6 shows anobservational result of the shapes of the first to third periodicstructures observed by the atomic force microscope; an image (b) in FIG.6 shows an observational result of the shapes of the first and secondperiodic structures observed by the atomic force microscope, an image(c) in FIG. 6 is a schematic view of the section enclosed by the squarein the image (b) in FIG. 6;

FIG. 7 shows schematic views of the periodic structures, specifically,an illustration (d) in FIG. 7 is a schematic view of the first to thirdperiodic structures in FIG. 6( a), and an illustration (e) in FIG. 7 isan enlarged view of the part indicated by the double-headed arrow in theillustration (d) in FIG. 7 and schematically shows the surface structurein which the first, second and third periodic structures are combined;

FIG. 8 shows a schematic view of the mold and images observed by thescanning electron microscope, specifically, an illustration (a) in FIG.8 is a schematic view of a punch mold, an image (b) in FIG. 8 shows anobservational result of the section enclosed by the square in theillustration (a) in FIG. 8, and an illustration (c) in FIG. 8 is anenlarged view of the section enclosed by the circle in the image (b) inFIG. 8;

FIG. 9 shows a procedure of a sliding test performed in examples andcomparative examples, specifically, an illustration (a) in FIG. 9 showsa step in which a workpiece is set in a certain position, anillustration (b) in FIG. 9 shows a step in which the punch mold ispounded into the workpiece, an illustration (c) in FIG. 9 shows a stepin which the punch mold is pulled out of the workpiece;

FIG. 10A lists the results of the sliding test performed in examples 1to 10;

FIG. 10B lists the results of the sliding test performed in examples 11to 20; and

FIG. 10C lists the results of the sliding test performed in examples 21to 25 and comparative examples.

DETAILED DESCRIPTION OF THE EMBODIMENTS

As described above, if small projections and depressions are formed onthe surface of a slide part in advance, the lubricant applied to theslide part or its counterpart before processing is stored in thedepressions (micro pools) on the surface. If there is no space to whichthe lubricant escapes when the slide part and its counterpart makecontact each other, the lubricant is encapsulated in the micro pools andsupplied to the friction interface with this state maintained.

Even when a lubricant injection mechanism supplies a large amount oflubricant to the friction interface, however, a continuous fluidlubrication film is rarely formed over the entire friction interface.This is particularly true for, for example, press working. There are twotypes of contact states on the friction interface: a solid/solid contactstate, in which the slide part and its counterpart make contact eachother, and a solid/liquid contact state, in which the slide part and thelubricant in micro pools make contact each other. In the solid/solidcontact state, boundary lubrication is dominant and metallic bonds alsooccur at the friction interface. On the other hand, in the solid/liquidcontact state, a high hydrostatic fluid pressure is applied to thelubricant in micro pools and a state similar to fluid lubrication isachieved.

For example, if a mold, which is a slide part 1, has a very flatsurface, since a lubricant 2 escapes from the friction interface betweenthe mold and a workpiece 3 as shown in FIG. 1, the workpiece 3 readilyadheres to the mold. Reference numeral 4 indicates an adhesive portion(only one adhesive portion is indicated by the reference numeral toeliminate complexity of the drawing). FIG. 2 shows the adhesion of theworkpiece 3 to the mold observed by a scanning electron microscope.Transfer particles (enclosed by the circles in the figure) are observedwhich are formed because parts of workpiece are left on the surface ofthe mold when the adhesive part 4 of the workpiece 3 and the mold isseparated. It is found from the observation that many transfer particleshave a diameter of hundreds of nanometers to one micrometer.

When periodic projections and depressions 1 a are formed on the surfaceof the mold as in the prior art, the solid/solid contact state isrelieved and adhesion of the workpiece 3 is reduced because thelubricant 2 is supplied to the friction interface as shown in FIG. 3. Inaddition, when irregular projections and depressions 1 b are formed onthe surface of the mold as shown in FIG. 4, adhesion of the workpiece 3is also reduced. In such conditions, however, it is impossible toprevent adhesion to the workpiece 3. This is because boundarylubrication is dominant in the solid/solid contact state as describedabove.

There are projections and depressions, flaws, crystal grain boundaries,accumulated processing strain, etc. on the surface of the workpiece 3.Friction between these uneven portions (e.g. high projections) and thesurface of the mold causes adhesion with a size of approximately 100 nmto 1 μm. The inventors found that a significantly larger amount oflubricant could be supplied to the friction interface as compared withthe prior art by forming at least two types of micro pools on thesurface of the slide part 1 among micro pools with a diameter similar tothe diameter (approximately from 100 nm to 1 μm) of the adhesion, micropools with a period (from 1 μm to 10 μm) larger than the size of theadhesion, and micro pools with a period (from 10 nm to 100 nm) smallerthan the size of the adhesion. Specifically, the slide part according tothe present invention has a surface structure including at least twoperiodic structures among a first periodic structure with a period offrom 10 nm to 100 nm inclusive and a depth of from 5 nm to 50 nminclusive, a second periodic structure with a period of from 100 nm to1000 nm inclusive and a depth of from 20 nm to 500 nm inclusive, and athird periodic structure with a period of from 1000 nm to 10000 nminclusive and a depth of from 100 nm to 3000 nm inclusive, in which oneof the at least two periodic structures is formed on the other periodicstructure.

If the slide part 1 according to the present invention is used for pressworking or other processing, a continuous fluid lubrication film isformed all over the friction interface, thereby preventing adhesion ofthe workpiece 3 (see FIG. 5). The reason why fluid lubrication can beachieved by micro pools (with a period of 1 μm to 10 μm) having a largerdiameter than that of a transfer particle is assumed to be that thelubricant is supplied to the friction interface in multiple stagesthrough wedge effects in the order of a micrometer (see non-patentliterature 1 for wedge effects). Accordingly, the surface structure ofthe slide part should be wedge-shaped. On the other hand, a mechanismfor using micro pools (with a period of 10 nm to 100 nm) having asmaller diameter than that of a transfer particle to relieve the contactpressure of a micro solid contact caused in the liquid lubrication stateat the friction interface is considered. Such effects can suppress theadhesion of the workpiece 3 to the surface of the slide part 1.

The inventors also found that the surface structure could be formed onthe slide part by radiating a gas cluster ion beam to the slide part.Processing by a gas cluster ion beam is a beam process, so a gas clusterion beam can be radiated to a part of the slide part, which is, forexample, an edge of the slide part. A fine ripple structure can beformed on the surface of the slide part by radiating a gas cluster ionbeam so that the angle formed by the gas cluster ion bean and a linenormal to the surface of the slide part becomes typically 30 degrees to75 degrees inclusive. It is preferable that the lines of the ripplestructure extend in a direction orthogonal to the slide direction forstoring the lubricant in micro pools.

The gas cluster ion beam apparatus disclosed by, for example, JapanesePatent No. 3994111 can be used to form the above surface structure onthe surface of the slide part. Clusters are generated by injecting asource gas from a nozzle to a cluster generating chamber kept undervacuum to aggregate gas molecules. The clusters are lead to anionization chamber as a gas cluster beam through a skimmer. In theionization chamber, an ionizer radiates an electron beam such as thermalelectrons to neutral clusters to ionize them. The ionized gas clusterbeam is accelerated by an accelerating electrode. The incident gascluster ion beam is adjusted by an aperture to have a predetermined beamdiameter and radiated to the slide part. When, for example, the surfaceof the slide part made of electrical insulator is flattened, gas clusterion may be neutralized in advance by electrons. It is possible tocontrol the angle at which the gas cluster ion beam is radiated to thesurface of the slide part by slanting the slide part. In addition, thegas cluster ion beam can be radiated in any direction by moving theslide part vertically or horizontally or rotating the slide part usingan X-Y stage or rotation mechanism.

There is a mechanism by which a hydrostatic fluid pressure is generatedin the water stored in micro pools because moisture in the normalatmosphere adsorbed on the surfaces of the slide part or the counterpartfunctions as a lubricant and generates a hydraulic pressure even thougha lubricant that causes a hydrostatic fluid pressure to generate inmicro pools is not applied to the slide part or the counterpart.Accordingly, application of a lubricant is not necessarily be requiredin the present invention.

Examples according to the present invention and comparative examples forconfirming the effects of the examples will be described below.

Example 1

A punch mold, which is an example of the slide part 1, was created bygrinding work. The punch mold is made of ultrahard material (JapaneseIndustrial Standards V20). The punch mold has a rectangular (1 mm×2 mm)bottom. To a side of the punch mold, a gas cluster ion beam was radiatedin parallel with a slide direction of the punch mold with respect to aworkpiece 3 so that the angle formed by the normal line of the surfaceof the punch mold and the gas cluster ion beam was 60 degrees. The slidedirection is indicated by the arrows in FIGS. 6( a) and 9(a) and 9(c).An argon gas was used as the source gas. The acceleration voltage was 20kV and the radiation dose amount was 3×10¹⁸ ions/cm². Upon completion ofradiation, the punch mold was observed by a scanning electron microscopeand atomic force microscope. Periodic structures were observed on theside and the edge of the punch mold. The shapes of the periodicstructures observed by the atomic force microscope are shown in FIGS. 6and 7. The periodic structures observed by the scanning electronmicroscope are shown in FIG. 8. Each of the periodic structures had aripple structure in which lines extend in a direction orthogonal to theslide direction. In detailed observation, as shown in FIG. 7( e), threetypes of periodic structures were combined. The first periodic structurehad a period of 20 nm to 70 nm and an average depth of 10 nm, the secondperiodic structure had a period of 200 nm to 500 nm and an average depthof 75 nm, and the third periodic structure had a period of 2000 nm to3000 nm and an average depth of 320 nm. In addition, of these periodicstructures, the first periodic structure had a particle structure (seeFIG. 6( c)) and the second and third periodic structures had a ripplestructure in which lines extend in a direction orthogonal to the slidedirection (see FIG. 6( b) for the second periodic structure or FIG. 6(a) for the third periodic structure.).

A sliding test was performed, in which a stainless steel (JapaneseIndustrial Standards SUS304) plate with a thickness of 0.1 mm to which alubricant (naphthene series mineral oil) was applied was punched by thepunch mold that was set in a press machine (see FIG. 9). The stainlesssteel (Japanese Industrial Standards SUS304) plate is equivalent to theworkpiece 3. Reference numeral 7 indicates a die. Whether a transferparticle 5 was present on a side wall of the punch mold was observed bythe scanning electron microscope every hundred thousands of shots andthe composition of the particle was analyzed by energy dispersive X-rayanalysis. No transfer particle 5 from the workpiece 3 (stainless steelplate) was observed until at least ten million shots (see FIG. 10A). InFIGS. 10A to 10C, EE indicates an example; CE indicates a comparativeexample; AccV indicates an acceleration voltage (kV), Dose indicates adose amount (ions/cm²), IrrA indicates a radiation angle (degree); Prdindicates period (nm); Dpth indicates a depth (nm); S50 indicates fivehundred thousand shots; S100 indicates one million shots; S200 indicatestwo million shots; S400 indicates four million shots; S1000 indicatesten million shots; symbol x indicates no generation of adhesion, andsymbol ∘ indicates occurrence of adhesion.

Examples 2 to 21

First to third periodic structures were formed on the surface of thepunch mold by changing the radiation conditions of a gas cluster ionbeam, and the same slide test as in example 1 was performed. Theradiation conditions of the gas cluster ion beam, the periods and depthsof the first to third periodic structures corresponding to the radiationconditions, and the presence or absence of a transfer particle 5 on theside wall of the punch mold are shown in FIGS. 10B and 10C.

In examples 1 to 17, the radiation angle of the gas cluster ion beam waschanged.

In examples 1, 18, and 19, the acceleration voltage of the gas clusterion beam was changed.

In examples 1, 20 and 21, the dose amount of the gas cluster ion beamwas changed.

Examples 22 to 24

The material of the slide part was changed, but the other conditionswere the same as in example 1. In example 22, the material of the punchmold was die steel SKD11 (Japanese Industrial Standards) and thematerial of the workpiece 3 was stainless steel SUS304 (JapaneseIndustrial Standards). In example 23, the material of the punch mold wasdie steel SKD11 (Japanese Industrial Standards) and the material of theworkpiece 3 was phosphor bronze. In example 24, the material of thepunch mold was superhard material (V20) and the material of theworkpiece 3 was phosphor bronze. The same sliding test as in example 1was performed. The radiation conditions of the gas cluster ion beam, theperiods and depths of the first to third periodic structurescorresponding to the radiation conditions, and the presence or absenceof a transfer particle 5 on the side wall of the punch mold are shown inFIG. 10C.

Example 25

A punch mold was created by grinding work. The material of the punchmold was superhard material (V20). The punch mold had a rectangular (1mm×2 mm) bottom. A periodic structure was formed on a side of the punchmold by an ultraprecise five-axis working machine. The periodicstructure is a line-and-space structure in which lines extend in adirection orthogonal to the slide direction. Then, the same slide testas in example 1 was performed. The periods and depths of the second andthird periodic structures and the presence or absence of a transferparticle 5 on the side wall of the punch mold are shown in FIG. 10C.

Comparative Example 1

The radiation angle of the gas cluster ion beam was set to 0 degrees, atwhich the radiation direction matches the direction of a line normal tothe side of the punch mold. The other conditions were the same as inexample 1. In this processing, only the first periodic structure wasformed on the side of the punch mold and the same slide test as inexample 1 was performed. The radiation conditions of the gas cluster ionbeam, the period and depth of the first periodic structure correspondingto the radiation conditions, and the presence or absence of a transferparticle 5 on the side wall of the punch mold are shown in FIG. 10C.

Comparative Example 2

Only the second periodic structure was formed on the side of the punchmold. The other conditions were the same as in example 25. The sameslide test as in example 1 was performed. The period and depth of thesecond periodic structure and the presence or absence of a transferparticle 5 on the side wall of the punch mold are shown in FIG. 10C.

Comparative Example 3

Only the third periodic structure was formed on the side of the punchmold. The other conditions were the same as in example 25. The sameslide test as in example 1 was performed. The period and depth of thethird periodic structure and the presence or absence of a transferparticle 5 on the side wall of the punch mold are shown in FIG. 10C.

Comparative Example 4

A punch mold was created in the same conditions as in example 1 exceptthat the radiation direction of the gas cluster ion bean was changed.The radiation direction of the gas cluster ion bean was changed so as tobe parallel with the slide direction. The first to third periodicstructures were formed so that the lines in the ripple structure, whichwere the second periodic structure, extended in a direction parallelwith the slide direction. The same slide test as in example 1 wasperformed. The periods and depths of the first to third periodicstructures and the presence or absence of a transfer particle 5 on theside wall of the punch mold are shown in FIG. 10C.

Comparative Example 5

A punch mold was created in the same conditions as in example 1 exceptthat the radiation direction of the gas cluster ion bean was changed.The radiation direction of the gas cluster ion bean was changed so thatthe angle formed by the radiation direction and the slide directionbecomes 45 degrees. The first to third periodic structures were formedso that the angle formed by the line in the ripple structure, which werethe second periodic structure, and the slide direction became 45degrees. The same slide test as in example 1 was performed. The periodsand depths of the first to third periodic structures and the presence orabsence of a transfer particle 5 on the side wall of the punch mold areshown in FIG. 10C.

The results of examples 1 to 21 and comparative example 1, the followingfacts are found. When only the first periodic structure is formed, atransfer particle 5 adheres to the surface of the press mold even if thepress count is as small as five hundred thousand shots. On the otherhand, when at least two of the first, second, and third periodicstructures are formed on the surface of the press mold, generation of atransfer particle 5 is significantly suppressed. When all of the first,second, and third periodic structures are formed as shown in examples 7to 15, further significant effects can be obtained and no transferparticle 5 is generated until four million shots. It is sufficient toset the angle formed by the radiation direction of the gas cluster ionbeam and the line normal to the side of the press mold to 30 degrees to75 degrees inclusive in order to form all of the three periodicstructures.

The results of examples 1 and 22 to 24 show that the effects of thepresent invention do not depend on the material of the slide part.

Consideration of example 25 and comparative examples 2 and 3 shows thatno effects are obtained if only one of the three periodic structures isformed. At least two of the three periodic structures need to be formedon the punch mold to obtain effects.

Consideration of example 1 and comparative examples 4 and 5 shows thatadhesion can be prevented if the slide part has a ripple structure inwhich lines extend in a direction substantially orthogonal to the slidedirection of the slide part.

Besides the above examples, the gas cluster ion beam can also beradiated to ceramic or silicon materials to form at least two periodicstructures for improvement of the sliding durability of the slide part.The present invention takes advantage of an essential phenomenon inwhich the gas cluster ion beam forms periodic structures such as rippleswhile flattening acute projections. Accordingly, it will be clear thatvarious conditions such as the type of the gas cluster and accelerationenergy, and the materials of the slide part and lubricant are notspecially limited. In addition, the above surface structure does notneed to be present on all slide areas and only needs to be present, forexample, at an edge of the slide part.

In the above examples, as shown in FIG. 7( e), the first periodicstructure and/or the second periodic structure were formed on a part ofthe third periodic structure that faces the slide part 1 when the slidepart 1 (punch mold) was inserted into the workpiece 3. This is becausethe gas cluster ion beam was radiated to the side of the slide part 1from only one direction; if the gas cluster ion beam is radiated fromthe opposite direction to this direction under appropriate radiationconditions, the first periodic structure and/or the second periodicstructure can be formed on the back of the above part of the thirdperiodic structure. In consideration of the fact that the frictionresistance when the slide part 1 is inserted into the workpiece 3 islarger than that when the slide part 1 is pulled out of the workpiece 3,the first periodic structure and/or the second periodic structure arepreferably formed on the above portion of the third periodic structureand the first periodic structure and/or the second periodic structureare preferably also formed on the back of the above portion of the thirdperiodic structure. This is also true when the first periodic structureand the second periodic structure are formed on the surface of the slidepart 1.

The foregoing description of the embodiments of the invention has beenpresented for the purpose of illustration and description. It is notintended to be exhaustive or to limit the invention to the precise formdisclosed. Modifications or variations are possible in light of theabove teachings. The embodiment was chosen and described to provide theillustration of the principles of the invention and its practicalapplication, and to enable one of ordinary skill in the art to utilizethe invention in various embodiments and with various modifications asare suited to the particular use contemplated. All such modificationsand variations are within the scope of the invention as determined bythe appended claims when interpreted in accordance with the breadth towhich they are fairly, legally, and equitably entitled.

What is claimed is:
 1. A slide part comprising at least one surfacestructure among a first surface structure in which a first periodicstructure with a period of 10 nm to 100 nm inclusive and a depth of 5 nmto 50 nm inclusive is formed on a second periodic structure with aperiod of 100 nm to 1000 nm inclusive and a depth of 20 nm to 500 nminclusive, a second surface structure in which the first periodicstructure is formed on a third periodic structure with a period of 1000nm to 10000 nm inclusive and a depth of 100 nm to 3000 nm inclusive, anda third surface structure in which the first periodic structure isformed on the second periodic structure and the second periodicstructure is formed on the third periodic structure.
 2. The slide partaccording to claim 1, wherein at least one of the second periodicstructure and the third periodic structure is a ripple structure.
 3. Theslide part according to claim 2, wherein the ripple structure of the atleast one of the second periodic structure and the third periodicstructure is formed in a direction orthogonal to a slide direction ofthe slide part.
 4. The slide part according to claim 1, wherein the atleast one surface structure is formed at least on an edge of the slidepart.
 5. The slide part according to claim 2, wherein the at least onesurface structure is formed at least on an edge of the slide part. 6.The slide part according to claim 3, wherein the at least one surfacestructure is formed at least on an edge of the slide part.
 7. The slidepart according to claim 1, wherein at least one of the second periodicstructure and the third periodic structure is formed by irradiation of agas cluster ion beam.
 8. The slide part according to claim 2, whereinthe at least one of the second periodic structure and the third periodicstructure is formed by irradiation of a gas cluster ion beam.
 9. Theslide part according to claim 3, wherein the at least one of the secondperiodic structure and the third periodic structure is formed byirradiation of a gas cluster ion beam.
 10. A method of processing asurface of a slide part using a gas cluster ion beam, comprisingradiating the gas cluster ion beam from a direction parallel to a slidedirection of the slide part.
 11. The method of processing the surface ofthe slide part according to claim 10, wherein an angle formed by the gascluster ion beam to be radiated and a line normal to the surface of theslide part ranges from 30 degrees to 75 degrees inclusive.